Date of Birth: 
About Richard S. Muller
- Richard Stephen Muller (born May 5, 1933) is an American professor in the Electrical Engineering and Computer Science Department of the University of California at Berkeley.
- He made contributions to the founding and growth of the field of MicroElectromechanical Systems (MEMS).
- Together with student, Roger T.
- Howe, he made the initial seminal contribution of polysilicon sacrificially-released beams in 1982.
- This led to a class of micromanufacturing processes called surface micromachining.
- These processes preceded the creation of low cost, mass-produced commercial micro accelerometers, which are used in automotive collision sensors for airbag deployment.
- Together with Richard M.
- White, he created BSAC (Berkeley Sensor & Actuator Center), an organization that produced many generations of academic researchers and intellectual properties in the MEMS field.
- MEMS is an activity that in 2013 accounted for multi-billion dollar revenue worldwide.
- He is a member of the US National Academy of Engineering.
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